A three-stage thermopneumatic peristaltic micropump for PDMS-based micro/nanofluidic systems

A. Tuantranont, W. Mamanee, T. Lomas, N. Porntheerapat, N. Afzulpurkar, A. Wisitsoraat
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引用次数: 3

Abstract

A three-stage thermopnuematic peristaltic micropump for controlling micro to nano litters of fluid was simply designed and fabricated from PDMS on glass slide. Pump structure consists of inlet and outlet, microchannel, three thermopneumatic actuations, and three heaters. In microchannel, fluid is controlled and pumped by peristaltic motion of actuation diaphragm. Actuation diaphragm can bend up and down by exploiting expanded air that induced by increasing heater temperature. The motion of fluid in nanoport was captured by digital camera every 5 minutes, and then the flow rate was monitored from height difference of fluid in nanoport by consecutive records. The optimum flow rate is 0.82 mul/min (=13.6 nl/sec) with applying 14 volts three-phase input driving voltage at frequency of 0.033 Hz.
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一种用于pdm微/纳米流体系统的三级热气动蠕动微泵
以载玻片上的PDMS为材料,设计制作了一种用于控制微到纳米量级流体的三级热力蠕动微泵。泵的结构由进出口、微通道、三个热气动执行机构和三个加热器组成。在微通道中,流体通过驱动隔膜的蠕动运动来控制和泵送。驱动膜片利用加热器温度升高引起的膨胀空气向上和向下弯曲。利用数码相机每隔5分钟捕捉一次纳米孔内流体的运动,通过连续记录纳米孔内流体的高差来监测流速。在0.033 Hz频率下施加14伏三相输入驱动电压时,最佳流量为0.82 μ l/min (=13.6 μ l/sec)。
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