Suspended CNT-FET piezoresistive strain gauges: Chirality assignment and quantitative analysis

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474287

M. Muoth, K. Chikkadi, Yu Liu, C. Hierold

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引用次数: 25

Abstract

Carbon nanotubes can withstand large elastic deformation and show pronounced piezoresistive effects which make them promising candidates for low-power strain sensors in the large strain regime. Integration of individual suspended nanotubes into complex microelectromechanical devices, including gate structures, is still a challenge. Here, ultraclean carbon nanotubes spanning across actuated MEMS electrodes are operated as suspended Carbon Nanotube Field-Effect Transistors (CNT-FETs) under repeated variable strain up to 4.5%, thus acting as small-sized piezoresistive strain gauges whose gauge factor is electrostatically tuned by the gate. We present the first quantified electromechanical analysis of suspended CNT-FETs to uniaxial strain applied by on-chip micro actuators.

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悬挂式碳纳米管-场效应管压阻应变片:手性分配和定量分析

碳纳米管可以承受大的弹性变形，并表现出明显的压阻效应，使其成为大应变下低功耗应变传感器的有希望的候选者。将单个悬浮纳米管集成到复杂的微机电器件中，包括栅极结构，仍然是一个挑战。在这里，跨越驱动MEMS电极的超清洁碳纳米管作为悬浮碳纳米管场效应晶体管(cnt - fet)在高达4.5%的反复可变应变下工作，从而充当小型压阻应变片，其测量因子由栅极静电调谐。我们首次提出了悬浮碳纳米管场效应管在片上微致动器施加的单轴应变下的量化机电分析。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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