I. Sayago, M. J. Fernández, J. Fontecha, M. C. Horrillo, E. Terrado, A. Seral-Ascaso, E. Muñoz
{"title":"Carbon nanotube-based SAW sensors","authors":"I. Sayago, M. J. Fernández, J. Fontecha, M. C. Horrillo, E. Terrado, A. Seral-Ascaso, E. Muñoz","doi":"10.1109/CDE.2013.6481359","DOIUrl":null,"url":null,"abstract":"Surface acoustic wave (SAW) gas sensors based on the use of carbon nanotube (CNT) networks as sensitive layers have been investigated for the detection of atmospheric gas pollutants: volatile organic compounds (VOCs), NO2, CO, and H2 . SAW sensor configuration consists of a delay line made on a piezoelectric substrate (ST -X cut quartz) and a sensitive layer (CNTs) deposited between the interdigital transducers (IDTs). CNT networks were fabricated by airbrushing single-walled-(SWCNTs) and double-walled- (DWCNTs) CNT dispersions onto quartz substrates. Among all the tested CNT materials and gases, only DWCNT -based SAW sensors were sensitive upon exposure to low concentration of octane and toluene, providing fast response and recovery times to these VOCs.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"4 1","pages":"127-130"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Spanish Conference on Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CDE.2013.6481359","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
Surface acoustic wave (SAW) gas sensors based on the use of carbon nanotube (CNT) networks as sensitive layers have been investigated for the detection of atmospheric gas pollutants: volatile organic compounds (VOCs), NO2, CO, and H2 . SAW sensor configuration consists of a delay line made on a piezoelectric substrate (ST -X cut quartz) and a sensitive layer (CNTs) deposited between the interdigital transducers (IDTs). CNT networks were fabricated by airbrushing single-walled-(SWCNTs) and double-walled- (DWCNTs) CNT dispersions onto quartz substrates. Among all the tested CNT materials and gases, only DWCNT -based SAW sensors were sensitive upon exposure to low concentration of octane and toluene, providing fast response and recovery times to these VOCs.