Anomalous ion currents in Bayard-Alpert ionization gauges

R. Lawson
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引用次数: 11

Abstract

A theory has been developed to account quantitatively for the anomalous ion-current behaviour which leads to errors in pressure measurement in Bayard-Alpert ionization gauges. The equilibrium anomalous ion current has been studied as a function of the gauge electron current and operating pressure. Analysis of the experimental results in the light of the theory yields values for the total atom and ion desorption probability per electron, the ion desorption probability per electron and the sticking coefficient of gas molecules on the grid surface. Though the theory suggests ways in which the pressure measurement error can be minimized, experiment shows that the error can be eliminated by the correct choice of grid material. Thus, for the residual gases normally found in vacuum systems, ionization gauges with either molybdenum or tantalum grids exhibit anomalous ion currents whilst gauges with tungsten or platinum grids do not. A practical form of grid utilizes platinum-clad molybdenum wire.
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贝亚德-阿尔珀特电离计中的异常离子流
一种理论已经发展到定量解释异常离子电流行为,导致误差的压力测量在贝亚德-阿尔珀特电离计。研究了平衡异常离子电流与规范电子电流和操作压力的关系。根据理论对实验结果进行分析,得到了每个电子的总原子和离子解吸概率、每个电子的离子解吸概率和气体分子在栅格表面的粘附系数。虽然理论提出了使压力测量误差最小化的方法,但实验表明,正确选择网格材料可以消除压力测量误差。因此,对于通常在真空系统中发现的残余气体,具有钼或钽栅格的电离计表现出异常的离子电流,而具有钨或铂栅格的电离计则没有。一种实用的栅极形式是利用铂包钼线。
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