Monolithic integration of an electrically tunable ultrahigh-Q optomechanical device

Z. Fang, S. Haque, Jintian Lin, Rongbo Wu, Jianhao Zhang, Min Wang, Muniyat Rafa, Ya Cheng, T. Lu
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Abstract

We demonstrate an electrically tunable ultrahigh-Q optomechanical device (mechanical Q~2.76×105) for the mechanical mode at 100.32 MHz by monolithically integrating an on-chip lithium niobate microresonator (optical Q~107) with a pair of in-plane microelectrodes.
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一种电可调谐超高q光机械装置的单片集成
我们通过将片上铌酸锂微谐振器(光学Q~107)与一对平面内微电极单片集成,展示了一种用于100.32 MHz机械模式的电可调谐超高Q光机械器件(机械Q~2.76×105)。
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