Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek
{"title":"Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels","authors":"Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek","doi":"10.1109/MEMSYS.2007.4433031","DOIUrl":null,"url":null,"abstract":"A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"123-126"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"24","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433031","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 24
Abstract
A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.
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