S. Okamura, A. Kakimi, Y. Yagi, K. Mori, R. Tsukamoto
{"title":"Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films","authors":"S. Okamura, A. Kakimi, Y. Yagi, K. Mori, R. Tsukamoto","doi":"10.1109/ISAF.1994.522298","DOIUrl":null,"url":null,"abstract":"Fine micropatterns with linewidth of 0.35 /spl mu/m were fabricated by irradiation with an electron beam of metal naphthenate films, being precursors of ferroelectric oxides, and development with a solvent. Relatively large patterns were crystallized into the single phase Bi/sub 4/Ti/sub 3/O/sub 12/ with c-axis orientation by successive heat-treatment at 800/spl deg/C. Micropatterns with linewidth of 1 /spl mu/m were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment of PZT and Bi/sub 4/Ti/sub 3/O/sub 12/ thin films formed by the dipping pyrolysis method, which is the base of this patterning process. Good ferroelectric properties were exhibited; the remanent polarization P/sub r/ and the coercive field E/sub c/ were 24 /spl mu/C/cm/sup 2/ and 39 kV/cm for PZT, and 1.6 /spl mu/C/cm/sup 2/ and 24 kV/cm for Bi/sub 4/Ti/sub 3/O/sub 12/, respectively.","PeriodicalId":20488,"journal":{"name":"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics","volume":"21 1","pages":"62-65"},"PeriodicalIF":0.0000,"publicationDate":"1994-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.1994.522298","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fine micropatterns with linewidth of 0.35 /spl mu/m were fabricated by irradiation with an electron beam of metal naphthenate films, being precursors of ferroelectric oxides, and development with a solvent. Relatively large patterns were crystallized into the single phase Bi/sub 4/Ti/sub 3/O/sub 12/ with c-axis orientation by successive heat-treatment at 800/spl deg/C. Micropatterns with linewidth of 1 /spl mu/m were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment of PZT and Bi/sub 4/Ti/sub 3/O/sub 12/ thin films formed by the dipping pyrolysis method, which is the base of this patterning process. Good ferroelectric properties were exhibited; the remanent polarization P/sub r/ and the coercive field E/sub c/ were 24 /spl mu/C/cm/sup 2/ and 39 kV/cm for PZT, and 1.6 /spl mu/C/cm/sup 2/ and 24 kV/cm for Bi/sub 4/Ti/sub 3/O/sub 12/, respectively.
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