Fabrication of division-of-focal-plane polarizer arrays by electron beam lithography

M. Yu, Liang Cao, Li Li, Litong Dong, Lu Wang, Xing Chen, Zhengxun Song, Z. Weng, Zuobin Wang
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引用次数: 4

Abstract

The division-of-focal-plane (DoFP) polarizer is used to capture polarization information in real time without rotating the polarizer. In this paper, different periods of aluminum nano-wire grids with four different orientations offset by 45° were fabricated using electron beam lithography (EBL) and inductively coupled plasma-reactive ion etching (ICP-RIE). The pitch of each unit was 7.4 μm in a standard square. The transmission intensity measurements of DoFP arrays with different periods were performed to obtain the extinction ratios and transmission ratios which were used to evaluate the performance of grid polarizers.
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用电子束光刻技术制造分焦平面偏振器阵列
在不旋转偏振镜的情况下,采用焦平面分割偏振镜实时捕获偏振信息。本文采用电子束光刻(EBL)和电感耦合等离子体反应离子刻蚀(ICP-RIE)技术制备了四种不同方向偏移45°的不同周期铝纳米线网格。每个单元的间距在标准正方形中为7.4 μm。通过测量不同周期DoFP阵列的透射强度,得到了消光比和透射比,并以此作为评价栅格偏振器性能的指标。
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