A. Perel, N. Bassom, Craig Chaney, Sruthi Chennadi, A. Cucchetti, J. Klein, J. Young
{"title":"VIISta HCPt: High current productivity solution for flash devices","authors":"A. Perel, N. Bassom, Craig Chaney, Sruthi Chennadi, A. Cucchetti, J. Klein, J. Young","doi":"10.1109/IIT.2014.6940035","DOIUrl":null,"url":null,"abstract":"In this paper we introduce the VIISta HCPt: a powerful upgrade to the proven VIISta High Current platform that delivers higher productivity and DPY advantages for Flash device manufacturers. Multiple HCPt units are currently running in production. A new source technology, added beam modulation capability, and an innovative tuning algorithm are integrated to provide higher productivity in the higher energy range. The new source design generates more efficient plasma to achieve increased extraction currents without compromising source life. A new tuning algorithm enables better transmission through the beam-line. A quadrupole lens has also been added for vertical beam height control, enabling higher beam currents at equivalent or lower dose rates. In addition to discussing the new innovative optical components, data on beam current, source life, and dose rate modulation are presented.","PeriodicalId":6548,"journal":{"name":"2014 20th International Conference on Ion Implantation Technology (IIT)","volume":"27 5","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 20th International Conference on Ion Implantation Technology (IIT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIT.2014.6940035","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this paper we introduce the VIISta HCPt: a powerful upgrade to the proven VIISta High Current platform that delivers higher productivity and DPY advantages for Flash device manufacturers. Multiple HCPt units are currently running in production. A new source technology, added beam modulation capability, and an innovative tuning algorithm are integrated to provide higher productivity in the higher energy range. The new source design generates more efficient plasma to achieve increased extraction currents without compromising source life. A new tuning algorithm enables better transmission through the beam-line. A quadrupole lens has also been added for vertical beam height control, enabling higher beam currents at equivalent or lower dose rates. In addition to discussing the new innovative optical components, data on beam current, source life, and dose rate modulation are presented.
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