R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki
{"title":"A microplasma chip for radical monitor","authors":"R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki","doi":"10.1109/OMN.2013.6659050","DOIUrl":null,"url":null,"abstract":"A chip device of generating atmospheric pressure microplasma was fabricated and characterized for light source in a radical monitoring system. The chip consisted of a Si substrate with channels and a lid of MgF2 glass plate with a floating electrode. The chip (20mm × 3mm) generated microplasma of φ200mm under the conditions of 20-40W VHF power and He gas flow of 500sccm. The microplasma emitted clear atomic spectral lines and molecular band spectra, which can be used as a light source in adsorption spectroscopy.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"23 8","pages":"43-44"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659050","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
A chip device of generating atmospheric pressure microplasma was fabricated and characterized for light source in a radical monitoring system. The chip consisted of a Si substrate with channels and a lid of MgF2 glass plate with a floating electrode. The chip (20mm × 3mm) generated microplasma of φ200mm under the conditions of 20-40W VHF power and He gas flow of 500sccm. The microplasma emitted clear atomic spectral lines and molecular band spectra, which can be used as a light source in adsorption spectroscopy.
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