基于溶液处理氧化锌锡tft的电路应用

Chen-Guan Lee, Tanvi Joshi, K. Divakar, A. Dodabalapur
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引用次数: 5

摘要

非晶氧化物半导体(AOS)已被广泛研究用于电路应用,如逆变器[1]、振荡器[2]和存储器件[3]。尽管基于溶液的工艺具有易于加工、制造成本低和覆盖面积大的优点,但电路中使用的大多数基于aos的tft都是用高真空系统加工的。在本文中,我们展示了基于溶液处理锌锡氧化物(ZTO) tft的电路,包括逆变器,环形振荡器和放大器。采用基于解的处理技术,实现了性能的均匀性和电路的功能性。
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Circuit applications based on solution-processed zinc-tin oxide TFTs
Amorphous oxide semiconductors (AOS) have been extensively studied for circuit applications, such as inverters [1], oscillators [2], and memory devices [3]. Most of the AOS-based TFTs used in the circuits are processed with high-vacuum systems even though solution-based processes have the advantages of easy processing, low fabrication cost and potential for large coverage area. In this paper, we demonstrate circuits based on solution-processed zinc-tin oxide (ZTO) TFTs, including inverters, ring oscillators and amplifiers. Performance uniformity and circuit functionality have been achieved with solution-based processing technique.
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