利用有机烃源制备非晶碳膜

J. Xu., W. Li, K. Chen, J.B. Xu
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引用次数: 0

摘要

以有机烃源二甲苯为原料,在等离子体增强化学气相沉积(PECVD)系统中制备了氢化非晶碳膜。利用各种技术对其显微结构和光学性能进行了研究。发现薄膜中存在带有芳香团簇的sp/sup 2/-结构。此外,与甲烷基a- c:H薄膜的单一宽PL峰相比,二甲苯基a- c:H薄膜的PL谱在蓝绿光区包含多个峰,这受射频功率的影响。在高sp/sup /含量比的二甲苯基a- c:H薄膜中也观察到场发射现象。
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Fabrication of amorphous carbon films by using organic hydrocarbon source
Hydrogenated amorphous carbon films were prepared by using organic hydrocarbon source, xylene, in a plasma enhanced chemical vapor deposition (PECVD) system. The microstructures and optical properties were investigated by using various kinds of techniques. It was found that there exist sp/sup 2/-structures with aromatic clusters in the films. Moreover, in contrast to a broad single PL peak in methane-based a-C:H films, the PL spectrum of xylene-based a-C:H films contains multiple peaks in blue-green light region, which is influenced by rf power. Field emission was also observed among xylene-based a-C:H films with a high sp/sup 2/ content ratio.
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