基于磁致动膜的高功率激光可调谐光扩散器

2010 International Conference on Optical MEMS and Nanophotonics Pub Date : 2010-12-17 DOI:10.1109/OMEMS.2010.5672185

J. Masson, A. Bich, W. Noell, R. Voelkel, K. Weible, N. D. de Rooij

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引用次数: 1

摘要

提出了一种基于MEMS技术的动态激光束成形机。研究了磁致变形单晶硅微膜与激光的共振变形。大口径反射镜显示线生成与角度高达1°和线平滑能力。高功率密度处理被证明高达140 W/cm2。

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Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes

A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.

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2010 International Conference on Optical MEMS and Nanophotonics

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