{"title":"激光显示技术","authors":"J. Kranert, C. Deter, T. Gessner, W. Dotzel","doi":"10.1109/MEMSYS.1998.659736","DOIUrl":null,"url":null,"abstract":"A new laser projection system is presented within this paper. The working principle and the main components are discussed. A cost effective and small sized laser projection system becomes possible by the use of solid-state lasers and the application of microsystem devices for laser beam deflection. The light deflecting devices fabricated by micromachining are an essential of this paper. Design, different technological approaches and measurement results of the vertical scanner and of the line scanning micromirror arrays are discussed.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"19","resultStr":"{\"title\":\"Laser display technology\",\"authors\":\"J. Kranert, C. Deter, T. Gessner, W. Dotzel\",\"doi\":\"10.1109/MEMSYS.1998.659736\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new laser projection system is presented within this paper. The working principle and the main components are discussed. A cost effective and small sized laser projection system becomes possible by the use of solid-state lasers and the application of microsystem devices for laser beam deflection. The light deflecting devices fabricated by micromachining are an essential of this paper. Design, different technological approaches and measurement results of the vertical scanner and of the line scanning micromirror arrays are discussed.\",\"PeriodicalId\":340972,\"journal\":{\"name\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"19\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1998.659736\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659736","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A new laser projection system is presented within this paper. The working principle and the main components are discussed. A cost effective and small sized laser projection system becomes possible by the use of solid-state lasers and the application of microsystem devices for laser beam deflection. The light deflecting devices fabricated by micromachining are an essential of this paper. Design, different technological approaches and measurement results of the vertical scanner and of the line scanning micromirror arrays are discussed.
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