P. A. Cooper, L. Carpenter, P. Mennea, C. Holmes, J. Gates, Peter G. R. Smith
{"title":"用于位移传感和可变衰减器的光机械悬臂装置","authors":"P. A. Cooper, L. Carpenter, P. Mennea, C. Holmes, J. Gates, Peter G. R. Smith","doi":"10.1117/12.2039806","DOIUrl":null,"url":null,"abstract":"An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":" 14","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optomechanical cantilever device for displacement sensing and variable attenuator\",\"authors\":\"P. A. Cooper, L. Carpenter, P. Mennea, C. Holmes, J. Gates, Peter G. R. Smith\",\"doi\":\"10.1117/12.2039806\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.\",\"PeriodicalId\":395835,\"journal\":{\"name\":\"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components\",\"volume\":\" 14\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2039806\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2039806","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optomechanical cantilever device for displacement sensing and variable attenuator
An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.
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