Mn掺杂对ZnO薄膜结构和光学性能的影响

A. Rashid, P. S. Menon
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引用次数: 2

摘要

采用自旋镀膜技术,采用溶胶-凝胶法制备了不同掺杂浓度的未掺杂和Mn掺杂ZnO薄膜。采用脱水乙酸锌和四水合乙酸锰的2-甲氧基乙醇溶液制备了Zn1−xMnxO薄膜。溶液经MEA稳定。在700℃的退火温度下,溶胶中Mn的含量变化范围为x = 0、0.02和0.04。采用原子力显微镜对样品表面形貌和纳米结构进行表征。XRD分析显示了薄膜的晶体结构和取向。通过增加锰的掺杂量,薄膜呈现出六方纤锌矿结构,并改善了薄膜的结晶质量。同时,利用紫外可见光谱对其光学性质进行了表征,发现随着Mn浓度的增加,透过率和带隙减小。
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Effect of Mn doping on the structural and optical properties of ZnO films
Undoped and Mn doped ZnO films with different doping concentration were synthesized by sol gel method using a spin coating technique. Zn1−xMnxO thin films are prepared using 2-methoxyethanol solution of zinc acetate dehydrate and manganese acetate tetrahydrate. The solution was stabilized by MEA. The quantity of Mn in the sol was varied from x = 0, 0.02 and 0.04 with annealing temperature of 700°C. The samples were characterized using AFM to investigate the surface morphology and nanostructures. The XRD analysis shows the crystalline structure and orientation of the films. The films exhibit hexagonal wurtzite structure and improved crystalline quality by increasing the Mn doping. Meanwhile, the optical properties were characterized using UV-Vis where the transmittance and band gap decreases upon increment of Mn concentration.
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