Jia Zhou, Po Li, Song Zhang, Feng Zhou, Yipin Huang, Pengyuan Yang, M. Bao
{"title":"一种新型的MEMS气体传感器，有效地结合了高灵敏度和高选择性","authors":"Jia Zhou, Po Li, Song Zhang, Feng Zhou, Yipin Huang, Pengyuan Yang, M. Bao","doi":"10.1109/ISAF.2002.1195970","DOIUrl":null,"url":null,"abstract":"A, novel MEMS gas sensor including a PZT thin film layer and a zeolite layer is developed in this paper, which shows effective combination of high sensitivity and high selectivity. Working in resonating mode, the sensor depicts the mass loading due to molecular adsorption of the zeolite by the frequency shift. The relationship between the frequency shift in percent and the concentration of Freon is linear. The minimum mass loading of 3.5 /spl times/ 10/sup -9/ and the sensitivity of -0.0024%/ppm can be determined from the experimental results.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"52 3","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity\",\"authors\":\"Jia Zhou, Po Li, Song Zhang, Feng Zhou, Yipin Huang, Pengyuan Yang, M. Bao\",\"doi\":\"10.1109/ISAF.2002.1195970\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A, novel MEMS gas sensor including a PZT thin film layer and a zeolite layer is developed in this paper, which shows effective combination of high sensitivity and high selectivity. Working in resonating mode, the sensor depicts the mass loading due to molecular adsorption of the zeolite by the frequency shift. The relationship between the frequency shift in percent and the concentration of Freon is linear. The minimum mass loading of 3.5 /spl times/ 10/sup -9/ and the sensitivity of -0.0024%/ppm can be determined from the experimental results.\",\"PeriodicalId\":415725,\"journal\":{\"name\":\"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.\",\"volume\":\"52 3\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-05-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2002.1195970\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2002.1195970","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity
A, novel MEMS gas sensor including a PZT thin film layer and a zeolite layer is developed in this paper, which shows effective combination of high sensitivity and high selectivity. Working in resonating mode, the sensor depicts the mass loading due to molecular adsorption of the zeolite by the frequency shift. The relationship between the frequency shift in percent and the concentration of Freon is linear. The minimum mass loading of 3.5 /spl times/ 10/sup -9/ and the sensitivity of -0.0024%/ppm can be determined from the experimental results.
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