重复雪崩条件下低压沟槽功率mosfet的失效机理

K. Bach, M. Asam, W. Kanert
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引用次数: 4

摘要

在本文中,我们提出了一种导致沟槽功率MOSFET在重复雪崩条件下在高漏极电流下工作时早期失效的机制(也称为“非箝位电感开关”)。虽然典型的失败表现为在接合缝处(或缝下)出现烧伤痕迹,但早期失败可能发生在活动区域的边缘或角落附近。电热模拟表明,在合理的假设下,这两种情况都可以用热失控来解释。
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Failure mechanisms of low-voltage trench power MOSFETs under repetitive avalanche conditions
In this paper we present a mechanism leading to early fails in a trench power MOSFET when operated at high drain currents under repetitive avalanche conditions (also referred to as “unclamped inductive switching”). While typical fails show burn marks at (or under) the bond stitches, early fails can occur close to the active area's edges or corners. With plausible assumptions both cases can be consistently explained by thermal runaway as demonstrated by electrothermal simulation.
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Vertical leakage/breakdown mechanisms in AlGaN/GaN-on-Si structures Advanced 0.13um smart power technology from 7V to 70V Failure mechanisms of low-voltage trench power MOSFETs under repetitive avalanche conditions Destruction behavior of power diodes beyond the SOA limit Clamped inductive turn-off failure in high-voltage NPT-IGBTs under overloading conditions
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