介电、铁电和压电薄膜器件在移动通信和医疗系统中的应用

M. Klee, D. Beelen, W. Keur, R. Kiewitt, B. Kumar, R. Mauczok, K. Reimann, C. Renders, A. Roest, F. Roozeboom, P. Steeneken, M. Tiggelman, F. Vanhelmont, O. Wunnicke, P. Lok, K. Neumann, J. Fraser, G. Schmitz
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引用次数: 5

摘要

介电薄膜、铁电薄膜和压电薄膜在下一代移动通信和医疗系统中越来越受到关注。基于介电、铁电和压电薄膜的薄膜技术使系统级封装(SiP)器件成为可能,从而在一个模块中实现高性能、小尺寸和低成本的各种功能的最佳集成。飞利浦为SiP技术开发了一个无源集成平台,包括射频滤波器、微机电开关、高值电容器以及集成在小模块中的无源和有源功能等关键功能。压电薄膜技术不仅在射频滤波器中发挥作用,而且是一类新型薄膜超声换能器的突破性技术。
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Application of Dielectric, Ferroelectric and Piezoelectric Thin Film Devices in Mobile Communication and Medical Systems
Dielectric, ferroelectric and piezoelectric thin films are getting more and more attention for next generation mobile communication and medical systems. Thin film technologies based on dielectric, ferroelectric and piezoelectric thin films enable system-in-package (SiP) devices, resulting in optimal integration of various functions in one module with respect to high performance, small size and low cost. Within Philips a passive integration platform for SiP technologies is developed, comprising key functions such as RF filters, micro-electromechanical switches, high-value capacitors as well as passive and active functions integrated in small modules. The piezoelectric thin film technologies do not only play a role for RF filters, but are also a breakthrough technology for a new class of thin film ultrasonic transducers.
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