基于表面电位的梯度通道应变高k栅极堆双材料双栅极MOSFET解析建模

Pritha Banerjee, Priyanka Saha, Dinesh Kumar Dash, S. Sarkar
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引用次数: 1

摘要

栅极功函数工程MOSFET与通道和介电工程的优势相结合,由于其对短通道效应(ses)的超强抗扰性,一直是一个重要的话题。本文通过求解二维泊松方程,采用抛物势近似方法,建立了梯度通道应变高k栅极堆叠双材料双栅MOSFET的解析模型。分析结果得到了ATLAS模拟数据的验证。
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Surface potential based Analytical Modeling of Graded Channel Strained High-k Gate stack Dual-Material Double Gate MOSFET
Gate work function engineered MOSFET coupled with the channel and dielectric engineering benefits has always been an important topic owing to their supreme immunity over Short Channel Effects (SCEs). In this paper, the analytical model of a Graded Channel Strained High-k Gate stack Dual-Material Double Gate MOSFET has been presented by solving the Poisson's equation in 2D and following parabolic potential approximation approach. The analytical results have been substantiated by ATLAS simulated data.
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