摩托罗拉GaAs集成电路制造

15th Annual GaAs IC Symposium Pub Date : 1993-10-10 DOI:10.1109/GAAS.1993.394487

P. O'Neil, B. Bernhardt, F. Nikpourian, C. Della, Y. Abad, G. Hansell

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引用次数: 7

摘要

化合物半导体(CS-1)是摩托罗拉第一个面向生产的砷化镓集成电路制造工厂。CS-1成立于1990年秋天，是一个最先进的制造工厂，旨在支持摩托罗拉内部对消费类产品GaAs ic不断增长的需求。作者概述了当前CS-1工艺流程，低成本的加工方法，在线生产监控和快速周期时间能力

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GaAs integrated circuit fabrication at Motorola

Compound Semiconductor (CS-1) is Motorola's first production-oriented gallium-arsenide integrated-circuit fabrication facility. Initiated in the Fall of 1990, CS-1 is a state-of-the-art manufacturing facility designed to support the growing internal Motorola needs for GaAs ICs for consumer products. The authors overview current CS-1 process flows, low-cost processing methodologies, online production monitoring, and fast cycle time capabilities.<>

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15th Annual GaAs IC Symposium

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