Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang
{"title":"一种用于单结构多轴MEMS惯性器件平面内测量的新型电极设计","authors":"Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang","doi":"10.1109/NEMS57332.2023.10190870","DOIUrl":null,"url":null,"abstract":"In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"348 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices\",\"authors\":\"Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei, Rong Zhang\",\"doi\":\"10.1109/NEMS57332.2023.10190870\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.\",\"PeriodicalId\":142575,\"journal\":{\"name\":\"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"348 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS57332.2023.10190870\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS57332.2023.10190870","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices
In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.
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