T. Perrier, R. Lévy, P. Kayser, B. Verlhac, J. Moulin
{"title":"部分覆盖铁磁薄膜的振动MEMS磁强计的建模","authors":"T. Perrier, R. Lévy, P. Kayser, B. Verlhac, J. Moulin","doi":"10.1109/ISISS.2018.8358130","DOIUrl":null,"url":null,"abstract":"This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh's energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"9 12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film\",\"authors\":\"T. Perrier, R. Lévy, P. Kayser, B. Verlhac, J. Moulin\",\"doi\":\"10.1109/ISISS.2018.8358130\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh's energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.\",\"PeriodicalId\":237642,\"journal\":{\"name\":\"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"9 12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISISS.2018.8358130\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISISS.2018.8358130","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film
This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh's energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.
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