Silicon-based High Gain Terahertz Metasurface Antennas working at 1 THz

High gain terahertz (THz) antennas working at 1 THz frequency is important for future terabit-per-second 6G communications systems. In this work, we propose a silicon (Si)-based THz metasurface antenna with high gain over 30 dBi. The Si dielectric resonator antenna is used as pixel element for the metasurface lens antenna and the Si THz antenna is fabricated by photolithography and deep reactive ion etching technology with Bosch process. The simulation and measurement results show that our proposed Si THz metasurface antenna can be realized with high gain and low-profile at 1 THz.