在单个CMOS芯片上的气体检测系统，包括电容式、量热式和质量敏感微传感器

2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Pub Date : 2002-08-07 DOI:10.1109/ISSCC.2002.993116

C. Hagleitner, D. Lange, N. Kerness, A. Hierlemann, O. Brand, H. Baltes

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引用次数: 18

摘要

采用工业0.8 /spl μ m CMOS技术制造的单芯片化学微传感器系统包括三种不同的聚合物包覆微机械传感器。该芯片构成用于检测挥发性有机物的手持装置的组成部分。片上电路包括信号调理，A/ d转换器，滤波器，数字控制器和串行总线接口(I/sup 2/C)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A gas detection system on a single CMOS chip comprising capacitive, calorimetric, and mass-sensitive microsensors

A single-chip chemical microsensor system fabricated in industrial 0.8 /spl mu/m CMOS technology includes three different polymer-coated micromachined transducers. The chip forms an integral part of a handheld unit to detect volatile organics. On-chip circuitry includes signal conditioning, A/D-converters, filters, digital controller, and serial bus interface (I/sup 2/C).

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2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)

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