{"title":"集成马赫-曾德干涉仪传感器的设计与仿真","authors":"M. Ionita, M. Kusko","doi":"10.1109/SMICND.2010.5650448","DOIUrl":null,"url":null,"abstract":"In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design and simulation of a integrated Mach-Zehnder interferometer sensor\",\"authors\":\"M. Ionita, M. Kusko\",\"doi\":\"10.1109/SMICND.2010.5650448\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.\",\"PeriodicalId\":377326,\"journal\":{\"name\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2010.5650448\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650448","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and simulation of a integrated Mach-Zehnder interferometer sensor
In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.
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