{"title":"用于EUV，软x射线和x射线光学的多层材料","authors":"Zhanshan Wang, Qiushi Huang, Zhong Zhang","doi":"10.1117/12.2218081","DOIUrl":null,"url":null,"abstract":"Driven by the requirements in synchrotron radiation applications, astronomical observation, and dense plasma diagnostics, the EUV, soft X-rays and X-rays multilayer optics have been tremendously developed. Based on the LAMP project for soft X-ray polarimetry, Co/C and Cr/C multilayers have been fabricated and characterized. Both Co/C and Cr/C multilayers reveal good optical performance working at 250 eV. Pd/Y multilayers have been successfully fabricated using reactive sputtering with nitrogen working at around 9.4 nm. EUV normal incidence Schwarzschild and soft X-ray grazing incidence KB microscopes were developed for ICF plasma diagnostics. This paper covers the outline of the multilayer optics and the current status in our lab.","PeriodicalId":122702,"journal":{"name":"SPIE OPTO","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multilayers for EUV, soft x-ray and x-ray optics\",\"authors\":\"Zhanshan Wang, Qiushi Huang, Zhong Zhang\",\"doi\":\"10.1117/12.2218081\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Driven by the requirements in synchrotron radiation applications, astronomical observation, and dense plasma diagnostics, the EUV, soft X-rays and X-rays multilayer optics have been tremendously developed. Based on the LAMP project for soft X-ray polarimetry, Co/C and Cr/C multilayers have been fabricated and characterized. Both Co/C and Cr/C multilayers reveal good optical performance working at 250 eV. Pd/Y multilayers have been successfully fabricated using reactive sputtering with nitrogen working at around 9.4 nm. EUV normal incidence Schwarzschild and soft X-ray grazing incidence KB microscopes were developed for ICF plasma diagnostics. This paper covers the outline of the multilayer optics and the current status in our lab.\",\"PeriodicalId\":122702,\"journal\":{\"name\":\"SPIE OPTO\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-05-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE OPTO\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2218081\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE OPTO","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2218081","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Driven by the requirements in synchrotron radiation applications, astronomical observation, and dense plasma diagnostics, the EUV, soft X-rays and X-rays multilayer optics have been tremendously developed. Based on the LAMP project for soft X-ray polarimetry, Co/C and Cr/C multilayers have been fabricated and characterized. Both Co/C and Cr/C multilayers reveal good optical performance working at 250 eV. Pd/Y multilayers have been successfully fabricated using reactive sputtering with nitrogen working at around 9.4 nm. EUV normal incidence Schwarzschild and soft X-ray grazing incidence KB microscopes were developed for ICF plasma diagnostics. This paper covers the outline of the multilayer optics and the current status in our lab.
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