电荷捕获的高级建模:RTN、1/f噪声、SILC和BTI

W. Goes, M. Waltl, Y. Wimmer, G. Rzepa, T. Grasser
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引用次数: 16

摘要

多年来,已经提出了几个模型来解释噪声现象,偏置温度不稳定性(BTI)和栅极泄漏电流等可靠性问题。大多数情况下,这些模型都是独立开发的,没有考虑到它们可能是由相同的物理现象引起的。然而,新的实验技术已经出现,能够在微观水平上研究这些可靠性问题。其中之一是时间相关缺陷光谱(TDDS)。它的大量使用导致了一些有趣的发现,包括BTI的可采成分是由于反应限制的过程。因此,一幅关于BTI管理过程的相当详细的图片已经出现。有趣的是,这幅图也被发现与其他可靠性问题的观察相匹配,例如随机电报噪声,1/f噪声以及栅极泄漏电流。此外,基于TDDS的研究结果导致了捕获/发射时间(CET)图的发展,该图可用于了解给定广泛分布参数的缺陷的动态响应。
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Advanced modeling of charge trapping: RTN, 1/f noise, SILC, and BTI
In the course of years, several models have been put forward to explain noise phenomena, bias temperature instability (BTI), and gate leakage currents amongst other reliability issues. Mostly, these models have been developed independently and without considering that they may be caused by the same physical phenomenon. However, new experimental techniques have emerged, which are capable of studying these reliability issue on a microscopic level. One of them is the time-dependent defect spectroscopy (TDDS). Its intensive use has led to several interesting findings, including the fact that the recoverable component of BTI is due to reaction-limited processes. As a consequence, a quite detailed picture of the processes governing BTI has emerged. Interestingly, this picture has also been found to match the observations made for other reliability issues, such as random telegraph noise, 1/f noise, as well as gate leakage currents. Furthermore, the findings based on TDDS have lead to the development of capture/emission time (CET) maps, which can be used to understand the dynamic response of the defects given their widely distributed parameters.
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