{"title":"毫米波范围内NiCr和Cr薄膜的吸收","authors":"A. Oleynik, V. S. Andreev","doi":"10.1109/APEDE48864.2020.9255416","DOIUrl":null,"url":null,"abstract":"This paper describes the technology for manufacturing nichrome and chromium films on mica substrates by thermal vacuum deposition. The thickness of these films controlled by a resistive method, which ensures the production of films with a thickness of ~10 nm. Experimental results of the study of absorption of film structures of nichrome-mica, chromium-mica in the frequency range of 75–260 GHz on the installation consisting of a vector analyzer of electrical circuits R&SZVA-40 by Rohde&Schwarz with the measuring channels. The dependence of the absorption coefficient of nichrome and chromium films at the level of 0.5 in the frequency ranges 102–110 GHz, 206.6-223.6 GHz and 102-116,6 GHz, 206-226,6 GHz, respectively, is obtained. It is advisable to use films as a millimeter radiation absorber.","PeriodicalId":277559,"journal":{"name":"2020 International Conference on Actual Problems of Electron Devices Engineering (APEDE)","volume":"133 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Absorption of NiCr and Cr Films in the Millimeter Wavelength Range\",\"authors\":\"A. Oleynik, V. S. Andreev\",\"doi\":\"10.1109/APEDE48864.2020.9255416\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes the technology for manufacturing nichrome and chromium films on mica substrates by thermal vacuum deposition. The thickness of these films controlled by a resistive method, which ensures the production of films with a thickness of ~10 nm. Experimental results of the study of absorption of film structures of nichrome-mica, chromium-mica in the frequency range of 75–260 GHz on the installation consisting of a vector analyzer of electrical circuits R&SZVA-40 by Rohde&Schwarz with the measuring channels. The dependence of the absorption coefficient of nichrome and chromium films at the level of 0.5 in the frequency ranges 102–110 GHz, 206.6-223.6 GHz and 102-116,6 GHz, 206-226,6 GHz, respectively, is obtained. It is advisable to use films as a millimeter radiation absorber.\",\"PeriodicalId\":277559,\"journal\":{\"name\":\"2020 International Conference on Actual Problems of Electron Devices Engineering (APEDE)\",\"volume\":\"133 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 International Conference on Actual Problems of Electron Devices Engineering (APEDE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/APEDE48864.2020.9255416\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International Conference on Actual Problems of Electron Devices Engineering (APEDE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APEDE48864.2020.9255416","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Absorption of NiCr and Cr Films in the Millimeter Wavelength Range
This paper describes the technology for manufacturing nichrome and chromium films on mica substrates by thermal vacuum deposition. The thickness of these films controlled by a resistive method, which ensures the production of films with a thickness of ~10 nm. Experimental results of the study of absorption of film structures of nichrome-mica, chromium-mica in the frequency range of 75–260 GHz on the installation consisting of a vector analyzer of electrical circuits R&SZVA-40 by Rohde&Schwarz with the measuring channels. The dependence of the absorption coefficient of nichrome and chromium films at the level of 0.5 in the frequency ranges 102–110 GHz, 206.6-223.6 GHz and 102-116,6 GHz, 206-226,6 GHz, respectively, is obtained. It is advisable to use films as a millimeter radiation absorber.
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