嵌入式硅扇出晶圆级封装的电学、热学和机械模拟

Cheng Chen, Daquan Yu, L. Wan
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引用次数: 4

摘要

华天科技于2015年提出并已投入生产的新型嵌入式硅扇出晶圆级封装(eSiFO),与典型的扇出工艺相比,其制造工艺相对简单,省去了成型和脱粘过程。本文首先简要介绍了eSiFO技术,然后重点研究了eSiFO技术的电学性能、热学性能以及RDL可靠性。本研究发现,eSiFO技术具有良好的封装性能,可以进一步为移动电子以及潜在的物联网和5G应用提供最优性能。
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Electrical, Thermal and Mechanical Simulation for Embedded Silicon Fan-out Wafer Level Packaging
A novel embedded silicon fan-out wafer level packaging (eSiFO), which was proposed by Huatian Technology in 2015 and now in production, has a relatively simple manufacturing process eliminating molding and de-bonding process compared to typical fan-out process. This paper briefly introduces eSiFO technology at first, and then mainly studies its electrical and thermal performance, as well as RDL reliability. This study finds that eSiFO technology has a good package performance, and can further provide optimal performance for mobile electronics and potential IoT and 5G applications.
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