铝栅金属化GaAs功率场效应管的可靠性研究

P. White, B. L. Hewett, J. Turner
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引用次数: 7

摘要

GaAs功率场效应管的加速寿命试验揭示了两种失效机制。首先,与焊盘处Au/Al相互作用有关的是栅极空洞的形成,在空气环境中估计的2eV活化能给出了在70°C通道温度下超过108小时的外推MTTF。在栅极焊盘上有金键合线的器件没有空洞形成,但故障与过量的漏极金属迁移有关。在70°C通道温度下估计的MTTF与栅极失效模式相当。两种失效模式的详细比较,以及在正常工作条件下哪种失效模式占主导地位的结论,有待于对两种线连接结构的设备进行持续应力测试的结果。
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Reliability Investigations of GaAs Power FETs with Aluminium Gate Metallisation
Accelerated life tests on GaAs power FETs have revealed two failure mechanisms. The first, associated with Au/Al interaction at the bonding pads, is gate void formation for which the estimated activation energy of 2eV in air ambient gives an extrapolated MTTF at 70°C channel temperature in excess of 108 hours. Devices with Au bond wires to the gate bonding pads show no void formation but failure is associated with excessive drain metal migration. Estimated MTTF at 70°C channel temperature is comparable to the gate failure mode. A detailed comparison of the two failure modes and conclusions as to which dominates under normal operating conditions await the outcome of constant stress tests on devices with both wire bond configurations.
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