太赫兹频率硅四分之一波片的制备

2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM) Pub Date : 2010-02-25 DOI:10.1109/PHOTWTM.2010.5421976

S. Saha, Yong Ma, J. Grant, A. Khalid, D. Cumming

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引用次数: 1

摘要

我们开发了用于1.5和2.5太赫兹的各向异性刻蚀人造介质四分之一波片(QWPs)。采用SU8增透涂层可进一步提高传输系数达12%。

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Fabrication of silicon quarter wave plate at Terahertz frequency

We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%.

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2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)

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