{"title":"用于机械传感的光子晶体纳米腔应变灵敏度研究","authors":"B. T. Tung, D. Dao, S. Sugiyama","doi":"10.1109/OMEMS.2010.5672122","DOIUrl":null,"url":null,"abstract":"This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67nm/mε and 1.4nm/mε, respectively.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"356 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of strain sensitivity of photonic crystal nanocavity for mechanical sensing\",\"authors\":\"B. T. Tung, D. Dao, S. Sugiyama\",\"doi\":\"10.1109/OMEMS.2010.5672122\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67nm/mε and 1.4nm/mε, respectively.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"356 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672122\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672122","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of strain sensitivity of photonic crystal nanocavity for mechanical sensing
This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67nm/mε and 1.4nm/mε, respectively.
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