E. Schorn-DiSalvi, R. Liquigan, B. Peters, J.S. Smith
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Development of an intelligent scheduler for semiconductor manufacturing facilities
Considerable academic research has investigated the topic of scheduling in manufacturing systems. This research investigates the available academic literature and commercial scheduling systems with respect to their applicability in semiconductor manufacturing systems. It recommends a design of an "intelligent scheduler" that attempts to use global information about the fab status and combines the applicable analytical methods from the academic literature with a simulation based evaluation tool into a decision support environment.
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