谐振式MEMS传感器中静电诱导模态串扰现象

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2014-04-01 DOI:10.1109/DTIP.2014.7056659

A. Brenes, J. Juillard, Filipe Vinci, Santos, Thales Chair

{"title":"谐振式MEMS传感器中静电诱导模态串扰现象","authors":"A. Brenes, J. Juillard, Filipe Vinci, Santos, Thales Chair","doi":"10.1109/DTIP.2014.7056659","DOIUrl":null,"url":null,"abstract":"The aim of this paper is to introduce an explanation for the amplitude saturation and inhibition phenomena in resonant MEMS pressure sensors, via the electrostatic coupling of two resonance modes. Our analysis and experimental results reveal that these phenomena may be ubiquitous in electrostatic resonant MEMS sensors.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors\",\"authors\":\"A. Brenes, J. Juillard, Filipe Vinci, Santos, Thales Chair\",\"doi\":\"10.1109/DTIP.2014.7056659\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The aim of this paper is to introduce an explanation for the amplitude saturation and inhibition phenomena in resonant MEMS pressure sensors, via the electrostatic coupling of two resonance modes. Our analysis and experimental results reveal that these phenomena may be ubiquitous in electrostatic resonant MEMS sensors.\",\"PeriodicalId\":268119,\"journal\":{\"name\":\"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DTIP.2014.7056659\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2014.7056659","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 9

摘要

本文的目的是通过两种谐振模式的静电耦合来解释谐振MEMS压力传感器中的幅度饱和和抑制现象。我们的分析和实验结果表明，这些现象可能在静电谐振MEMS传感器中普遍存在。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors

The aim of this paper is to introduce an explanation for the amplitude saturation and inhibition phenomena in resonant MEMS pressure sensors, via the electrostatic coupling of two resonance modes. Our analysis and experimental results reveal that these phenomena may be ubiquitous in electrostatic resonant MEMS sensors.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

自引率

0.00%

发文量