n沟道深耗尽SOS/MOSFET的弱累积工作

R. Jerdonek, W. Bandy, H. Lin
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引用次数: 0

摘要

本文的目的是确定在弱积累下工作的n沟道深耗尽SOS/MOSFET的电子迁移率增加与栅极电位的依赖关系。这是通过分析SOS薄膜中载流子迁移率的独特深度依赖性以及将积累层的厚度表征为栅极电位的函数来实现的。利用栅极电位与表面电位之间超越关系的封闭近似,简化了厚度计算。与器件电导数据的比较表明,我们的理论模型是准确的。
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Weak accumulation operation of the N-channel deep-depletion SOS/MOSFET
The purpose of this paper is to determine the dependence of electron mobility increase upon gate potential for the n-channel deep-depletion SOS/MOSFET operating in weak accumulation. This is accomplished by analyzing the unique depth dependence of the carrier mobility in thin SOS films and by characterizing the thickness of the accumulation layer as a function of gate potential. The thickness calculation is simplified with the aid of a closed form approximation for the transcendental relationship between gate and surface potentials. Comparison to device conductance data shows that our theoretical model is accurate.
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