传感器晶体中的噪声:密封和非密封

Yoonkee Kim, J. Vig
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引用次数: 0

摘要

噪声限制了确定振荡器频率的准确性。同样,在谐振传感器中,噪声限制了测量分辨率,即,它限制了在规定的不确定度下可以测量的最小被测量量。在一些传感器应用中,如石英晶体微天平(如化学传感器),传感器晶体不是密封的。在实验室环境温度和接近翻转温度(83/spl℃)的烤箱中,测量了密封的5 MHz基模at切割石英谐振器的噪声[/spl sigma//sub y/(/spl tau/) at几/spl tau/]。然后打破密封件,在环境温度和周转温度下再次测量谐振器。正如人们所预料的那样,打破密封增加了等效串联电阻和谐振器的老化。当谐振器在接近周转温度时,未密封谐振器的短期稳定性与密封谐振器的短期稳定性无显著差异。事实上,在某些情况下,未密封的谐振器表现出更好的短期稳定性。在实验室环境温度下,由于温度波动引起的噪声是破坏密封的主要影响因素。
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Noise in sensor crystals: hermetically sealed and unsealed
Noise limits the accuracy with which the frequency of an oscillator can be determined. Similarly, in a resonant sensor, noise limits the measurement resolution, i.e., it limits the minimum quantity of a measurand that can be measured with a specified uncertainty. In some sensor applications, such as in quartz crystal microbalances (e.g., chemical sensors), the sensor crystals are not hermetically sealed. The noise [/spl sigma//sub y/(/spl tau/) at several /spl tau/] of hermetically sealed 5 MHz fundamental mode AT-cut quartz resonators was measured at laboratory ambient temperature, and in an oven near the turnover temperatures (83/spl deg/C). Then the hermetic seals were broken and the resonators were measured again at ambient and turnover temperatures. As one would expect, breaking the hermetic seal increased the equivalent series resistance and the aging of the resonators. When the resonators were in the oven near their turnover temperatures, the unsealed resonators' (drift-removed) short-term stability was not significantly different from that of the sealed ones. In fact, in some cases, the unsealed resonators exhibited better short term stability. The noise due to temperature fluctuations at laboratory ambient temperatures dominated the effects of breaking the hermetic seal.
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