一种基于少层石墨烯剥离薄膜的场效应装置

S. R. Kasjoo, M. M. Ramli, M. Zakaria, M. Arshad, R. Ayub, R. A. Rahim, U. Hashim
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引用次数: 1

摘要

本文制备了一种基于少层石墨烯剥离薄膜的背控场效应器件,并对其性能进行了表征。从器件跨导中提取的FLG膜的估计空穴迁移率约为843 cm2V-1s-1,低于典型的报告值。从带电杂质密度和FLG膜与金属的接触电阻两个方面简要讨论了迁移率降低的原因。利用机械剥离法制备FLG薄膜,成本低、速度快、操作简单,也可用于其他石墨烯基器件的开发。
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A field-effect device based on an exfoliated thin film of few-layer graphene
In this work, a back-gated field-effect device based on an exfoliated thin film of few-layer graphene (FLG) has been fabricated and some of its properties were characterized. The estimated hole mobility of the FLG film, extracted from the device transconductance, was approximately 843 cm2V-1s-1 which was lower than the typical reported values. The reasons for the lower mobility were briefly discussed in terms of charged impurity density, and contact resistance between FLG film and metal. The use of mechanical exfoliation method in producing thin films of FLG, which is cheap, fast and simple, can also be exploited in the development of other graphene-based devices.
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