Integration of FinFETs and 3D nanoprobes devices on a common bio-platform for monitoring electrical activity of single neurons

Our knowledge of the functioning of the central nervous system still remains scarce to date. A better understanding of its behavior, in either normal or diseased conditions, goes through an increased knowledge of basic mechanisms involved in neuronal function, including at the single cell resolution. In that scope, the miniaturization of electronic components and emergence of nano-biotechnology open new perspectives to follow neuronal activities at the single cell level. Here, we propose to co-integrate very high surface-to-volume ratio active (Fin-FETs) and passive devices (vertical nanowire-probes) on the same platform to monitor electrical activity of single mammalian neurons. Very high signal noise ratio has been demonstrated, especially in intracellular configuration (up to 80). The bio-platform was used to examine the effect of bio-chemical and electrical stimulations on neuronal activity.