Modeling and design of RF MEMS structures using computationally efficient numerical techniques

The modeling of MEMS structures using MRTD is presented. Many complex RF structures have been inadequately studied due to limitations in simulation methods. The space and time adaptive grid, as well as the ability to handle intracell feature variations, makes MRTD an ideal method for modeling these structures. MRTD is shown to be able to handle the complex structures found in modern wireless and microwave communication systems efficiently and accurately. Specifically, micromachined structures such as MEMS are treated.