氮化钛衬底上直接生长增强碳纳米管森林的场发射特性

Stefanie Haugg, C. Hedrich, Luis-Felipe Mochalski, Isabel González Díaz-Palacio, R. Zierold, R. Blick
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引用次数: 0

摘要

在氮化钛(TiN)涂层基材上而不是原始基材上生长的碳纳米管(CNT)森林的场发射(FE)减少高达59%。通过等离子体增强原子层沉积(PEALD)生成的衬底上的TiN薄膜增强了碳纳米管的FE性能,而对发射极形貌没有明显影响。这些结果从本体转移到纳米膜衬底,揭示了改进的FE性能,这可能用于未来的传感器应用。
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Enhancement of Field Emission Properties of Carbon Nanotube Forests by Direct Growth on Titanium Nitride-Coated Substrates
A turn-on field reduction of up to 59% was observed for field emission (FE) from carbon nanotube (CNT) forests that were grown on titanium nitride (TiN) coated substrates instead of on pristine ones. The FE properties of the CNTs were enhanced by the TiN films on the substrates-which were generated by plasma-enhanced atomic layer deposition (PEALD)-without a noticeable impact on the emitter morphology. These results are transferred from bulk to nanomembrane substrates revealing improved FE properties, which could potentially be used for future sensor applications.
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