一种新的基于积分方程的全波分层互连模拟器

Zhaohui Zhu, Xing Wang, S. Dvorak, J. Prince
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引用次数: 0

摘要

需要全波模拟器对高性能3D互连进行精确建模。然而,目前的全波求解器效率太低,无法处理大型互连问题。本文采用解析方法,结合基于物理的展开函数,开发了一种高效的基于积分方程的全波分层互连模拟器(ua - fwis)。通过与商用仿真工具的比较,验证了采用该策略开发的仿真器的精度。
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A new integral-equation-based, full-wave layered interconnect simulator
Full-wave simulators are required for accurate modeling of high-performance, 3D interconnects. However, current full-wave solvers are too inefficient to handle large interconnect problems. In this paper, a new efficient, integral-equation-based, full-wave layered interconnect simulator (UA-FWLIS) is developed by using analytical methods and incorporating physics-based expansion function. The accuracy of the simulator developed using this strategy is validated by comparing with commercial simulator tools.
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