利用低钾氧化物改善隧道场效应管漏电流的新挑战

M. Vadizadeh, B. Davaji, M. Fathipour
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引用次数: 1

摘要

在本文中,我们证明了通过使用低k氧化物和栅极功函数工程,可以显著降低隧道场效应晶体管(TFET)的失态电流。为了提高TFET中的离子/离合比,研究了采用第二栅极的影响,因此在漏极附近的栅极(Gate2)上使用低钾氧化物可以忽略边缘场效应。因此,泄漏电流减小。此外,对源附近的栅极(Gate1)采用了功函数工程方法,进一步减小了关断电流。
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New challenges on leakage current improvement in tunnel FET by using low-k oxide
In this paper, we have shown that off-state current in the Tunneling Field Effect Transistor (TFET) can be reduced dramatically by using a low-k oxide and employing gate work function engineering. In order to enhance Ion/Ioff ratio in the TFET, the effect of second gate employing has been investigated, hence using a low-k oxide for the gate near the drain side (Gate2) resulted in omission of fringing field effects. Therefore, the leakage current is decreased. Also a work function engineering method has been employed for the gate near the source (Gate1) to further reduce the off state current.
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