{"title":"电子书预览:微电子失效分析的STEM-in-SEM成像技术","authors":"Jason Holm, B. Caplins","doi":"10.31399/asm.edfa.2020-1.p026","DOIUrl":null,"url":null,"abstract":"\n This article describes an ebook titled STEM-in-SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, intended as an introductory tutorial for those with little or no transmission imaging experience and as a source of ideas for SEM users looking to expand the imaging and diffraction capabilities of their equipment.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ebook Preview: STEM-in-SEM Imaging Techniques for Microelectronics Failure Analysis\",\"authors\":\"Jason Holm, B. Caplins\",\"doi\":\"10.31399/asm.edfa.2020-1.p026\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n This article describes an ebook titled STEM-in-SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, intended as an introductory tutorial for those with little or no transmission imaging experience and as a source of ideas for SEM users looking to expand the imaging and diffraction capabilities of their equipment.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2020-1.p026\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2020-1.p026","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ebook Preview: STEM-in-SEM Imaging Techniques for Microelectronics Failure Analysis
This article describes an ebook titled STEM-in-SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, intended as an introductory tutorial for those with little or no transmission imaging experience and as a source of ideas for SEM users looking to expand the imaging and diffraction capabilities of their equipment.
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