液相沉积光刻技术制备梯度折射率(GRIN)微光学器件

Adam C. Urness, Michael C. Cole, R. McLeod
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摘要

单光子扩散光聚合物可以自行开发三维(3D)折射率图案,达到厘米厚的固体体积,用于制造微光学。然而,在固体厚材料中,由于衍射和直径为100微米或更大的折射率特征的过度显影时间,一个光子吸收不能完全控制三维折射率分布。我们提出了一种制造方法和光聚合物配方,可以有效地制造具有任意特征尺寸和形状的可编程、梯度折射率的mm3光学器件。指数对比度为0.1,比商用全息光聚合物大20倍。该器件是由投影光刻技术构建的自开发光聚合物的重复微流控层制成的。该工艺具有不同寻常的特性,即固定厚度的总制造时间随着层数的增加而减少,从而减少了高轴向分辨率微光学的制造时间。我们通过制造厚波导阵列和梯度折射率透镜来演示这一过程。
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Liquid deposition photolithography for the fabrication of gradient index (GRIN) micro-optics
One photon diffusive photopolymers enable self-developing three dimensional (3D) refractive index patterning of up to cm thick solid volumes for the fabrication of micro-optics. However, one photon absorption in solid, thick materials does not yield complete control of the 3D refractive index distribution due to diffraction and the excessive development time for index features measuring 100’s of microns in diameter or larger. We present a fabrication method and photopolymer formulation that can efficiently create mm3 optical devices with programmable, gradient index of refraction with arbitrary feature size and shape. Index contrast of 0.1 is demonstrated, which is 20 times larger than commercial holographic photopolymers. Devices are fabricated by repetitive micro-fluidic layering of a self-developing photopolymer structured by projection lithography. The process has the unusual property that total fabrication time for a fixed thickness decreases as the number of layers is increased, reducing the fabrication time for high axial resolution micro-optics. We demonstrate the process by fabricating thick waveguide arrays and gradient index lenses.
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