{"title":"第一个用于心血管压力测量的表面微机械压力传感器","authors":"E. Kalvesten, L. Smith, L. Tenerz, G. Stemme","doi":"10.1109/MEMSYS.1998.659821","DOIUrl":null,"url":null,"abstract":"A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon diaphragm area of 103/spl times/103 /spl mu/m has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 /spl mu/V/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"87","resultStr":"{\"title\":\"The first surface micromachined pressure sensor for cardiovascular pressure measurements\",\"authors\":\"E. Kalvesten, L. Smith, L. Tenerz, G. Stemme\",\"doi\":\"10.1109/MEMSYS.1998.659821\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon diaphragm area of 103/spl times/103 /spl mu/m has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 /spl mu/V/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications.\",\"PeriodicalId\":340972,\"journal\":{\"name\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"87\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1998.659821\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659821","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The first surface micromachined pressure sensor for cardiovascular pressure measurements
A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon diaphragm area of 103/spl times/103 /spl mu/m has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 /spl mu/V/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications.
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