一种集成二氧化硅光学器件与微机电系统的新工艺

2010 International Conference on Optical MEMS and Nanophotonics Pub Date : 2010-12-17 DOI:10.1109/OMEMS.2010.5672199

K. Grutter, A. Yeh, S. Patra, Ming C. Wu

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引用次数: 3

摘要

我们开发了一种新的制造工艺，将硅MEMS驱动器与硅光学元件集成在一起。悬浮式硅光波导由硅静电梳状驱动器驱动，在35V偏置下最大位移为8µm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A new fabrication technique for integrating silica optical devices and MEMS

We have developed a novel fabrication process which integrates silicon MEMS actuators with silica optical components. Suspended silica optical waveguides are actuated by a silicon electrostatic comb drive actuator, with a maximum displacement of 8µm at 35V bias.

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2010 International Conference on Optical MEMS and Nanophotonics

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