Xinyuan Dou, Xiaolong Wang, Haiyu Huang, Xiaohui Lin, Ray T. Chen
{"title":"嵌入微镜聚合物波导金属硬模的制备","authors":"Xinyuan Dou, Xiaolong Wang, Haiyu Huang, Xiaohui Lin, Ray T. Chen","doi":"10.1109/PHOTWTM.2010.5421953","DOIUrl":null,"url":null,"abstract":"In this paper, we presented fabrication of nickel metal mold with 45º tilted surfaces on both waveguide ends through electroplating process. To obtain 45º angle, SU-8 was exposed under D.I. water, with repeatable 0.5º error.","PeriodicalId":367324,"journal":{"name":"2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Fabrication of metallic hard mold for polymeric waveguides with embedded micro-mirrors\",\"authors\":\"Xinyuan Dou, Xiaolong Wang, Haiyu Huang, Xiaohui Lin, Ray T. Chen\",\"doi\":\"10.1109/PHOTWTM.2010.5421953\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we presented fabrication of nickel metal mold with 45º tilted surfaces on both waveguide ends through electroplating process. To obtain 45º angle, SU-8 was exposed under D.I. water, with repeatable 0.5º error.\",\"PeriodicalId\":367324,\"journal\":{\"name\":\"2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PHOTWTM.2010.5421953\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PHOTWTM.2010.5421953","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of metallic hard mold for polymeric waveguides with embedded micro-mirrors
In this paper, we presented fabrication of nickel metal mold with 45º tilted surfaces on both waveguide ends through electroplating process. To obtain 45º angle, SU-8 was exposed under D.I. water, with repeatable 0.5º error.