Fabrication and surface modification process for micro gas bearing

A hydrodynamic gas bearing able to reduce power losses is selected, and the possibility of reducing its size is examined. The first consideration is how laser-assisted etching can be employed to form spiral grooves on the cylindrical shaft. In a hydrodynamic gas bearing, the shaft and bearing come into contact with each other when the actuator is started and stopped. It is thus necessary to reduce the frictional torque during starting and to ensure a satisfactory level of wear resistance. Next, the grooved shaft surface is modified by ion mixing. Its sliding characteristics are investigated to assess the reduction in friction and improvement in wear resistance. This reveals that it is possible to form a spiral grove 6 /spl mu/m in width and 2 /spl mu/m in depth on a 0.5-mm-diameter shaft, It is also established that, by forming a CrN film on the shaft, it is possible to achieve a friction coefficient of approx. 0.2, representing a satisfactory wear resistance. It is thus concluded that the hydrodynamic gas bearing selected can be used as a micro-actuator component.