CVD方法制备单氧化镓纳米线用于太阳盲紫外探测器。

Song Liu, Shufang Ma, Xin Huang, G. Wang, Bo Liu, Dou Wang, Huican Ouyang, Chaoming Xu, Sheng Wei Liu, Guo-Dong Wei, B. Han, X. Hao, Bingshe Xu
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摘要

寻找一种简单、节能、低成本的化学气相沉积法制备太阳盲探测器用氧化镓纳米线的方法。氧化镓(Ga2O3)具有4.5 ~ 4.9eV的带隙和高达8 MV/cm的击穿场强,在日盲紫外探测和大功率器件中具有很大的应用前景。值得注意的是,由于Ga2O3 NWs具有高效的光载流子分离和收集特性,并且带隙宽度与深紫外光子的能量完美匹配,因此是目前太阳盲紫外探测材料的重点研究对象。寻找一种简单的方法合成表面光滑、直径均匀的Ga2O3纳米线,制备的单根氧化镓纳米线紫外探测器具有较高的光电转换效率。采用化学气相沉积(CVD)方法,以金颗粒为催化剂,砷化镓(GaAs)为镓源,在SiO2/Si衬底上低温制备Ga2O3 NWs。x射线衍射和拉曼光谱表征表明NWs的晶体结构为β-Ga2O3,扫描电镜(SEM)表征表明NWs直径均匀,表面光滑。高分辨率透射电镜(HRTEM)表征表明材料具有较高的晶体质量。制备了单Ga2O3 NW光导太阳盲紫外探测器,显示出高响应率和外量子效率的优异性能。研究了生长温度和金催化剂尺寸对β-Ga2O3 NWs形貌的影响。结果表明:反应温度为625℃,Au催化剂直径约为30~50 nm时,更有利于形成具有晶体结构、表面光滑、直径均匀的NMs。实验结果表明,该器件具有较高的灵敏度(R=149.82A/W),外量子效率(EQE=73206%),响应率τ上升=0.66s, τ下降=0.45s。
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CVD approach to a single gallium oxide nanowire for solar-blind UV detector.
Finding a simple, energy-saving and low-cost synthesis method to process gallium oxide nanowires by CVD for solar-blind detector. Due to a bandgap of 4.5 ~ 4.9eV and a high breakdown field strength of 8 MV/cm, gallium oxide (Ga2O3) has great application prospects in solar blind ultraviolet detection and high-power devices. Notably, Ga2O3 NWs are currently the key research objects of solar-blind UV detection materials because of the characteristics of efficient photocarrier separation and collection, and the bandgap width perfectly matches the energy of deep ultraviolet photons. To find a simple method to synthesis Ga2O3 nanowire with smooth surface and uniform diameter, and the prepared single gallium oxide nanowire UV detector has high photoelectric conversion efficiency. Ga2O3 NWs are prepared on the SiO2/Si substrate by chemical vapor deposition (CVD) approach at low reaction temperature with gold particles serveing as the catalyst and gallium arsenide (GaAs) as a gallium source. X-ray diffraction and Raman spectroscopy characterization indicate the crystal structure of NWs is β-Ga2O3, and scanning electron microscope (SEM) characterization proves that the NWs have uniform diameter and smooth surface. Moreover, the high-resolution transmission electron microscopy (HRTEM) characterization shows that the material had high crystal quality. And the photoconductive solar-blind UV detector with a single Ga2O3 NW is prepared, showing the excellent performance of the high responsivity and external quantum efficiency. The effects of growth temperature and the size of gold catalyst on the morphology of β-Ga2O3 NWs have been investigated. The results show that with the reaction temperature is 625℃ and the diameter of Au catalyst is about 30~50 nm, it is more conducive to the formation of NMs with crystal structure, smooth surface and uniform diameter. And the performance of the solar-blind UV photodetector show that the device has higher sensitivity (R=149.82A/W), external quantum efficiency (EQE=73206%), response rate τrise=0.66s, and τdowm=0.45s.
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